%0 Journal Article %T Micromechanical Properties of Nanometer-Thick Layers of Implanted Alumina %+ Institute of Electronic Materials Technology (IEMT) %+ The Andrzej Soltan Institute for Nuclear Studies (THE ANDRZEJ SOLTAN INSTITUTE FOR NUCLEAR STUDIES) %+ Institute of Electronic Materials Technology (IEMT) %+ Laboratoire d'étude des milieux nanométriques (LEMN) %A Jagielski, J. %A Piatkowska, A. %A Librant, Zdzislaw %A Aubert, P. %A Legrand-Buscema, C. %A Maciejak, O. %A Piekoszewski, J. %A Werner, Z. %< avec comité de lecture %@ 0377-6883 %J Solid State Phenomena %I Trans Tech Publications Ltd %V 101-102 %P 213-216 %8 2005-01 %D 2005 %R 10.4028/www.scientific.net/SSP.101-102.213 %K Ion implantation %K ceramics %K friction %K nanohardness %Z Physics [physics]/Mechanics [physics]/Mechanics of materials [physics.class-ph]Journal articles %G English %L hal-02157921 %U https://univ-evry.hal.science/hal-02157921 %~ UNIV-EVRY